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Article: Three-dimensional stretchable microelectronics by projection microstereolithography (PμSL)

TitleThree-dimensional stretchable microelectronics by projection microstereolithography (PμSL)
Authors
Keywords3D microelectronics
3D printing
Advanced manufacturing
Flexible electronics
Stretchable electronics
Issue Date2021
Citation
ACS Applied Materials and Interfaces, 2021, v. 13, n. 7, p. 8901-8908 How to Cite?
AbstractStretchable and flexible electronics conformal to human skin or implanted into biological tissues has attracted considerable interest for emerging applications in health monitoring and medical treatment. Although various stretchable materials and structures have been designed and manufactured, most are limited to two-dimensional (2D) layouts for interconnects and active components. Here, by using projection microstereolithography (PμSL)-based three-dimensional (3D) printing, we introduce a versatile microfabrication process to push the manufacturing limit and achieve previously inaccessible 3D geometries at a high resolution of 2 μm. After coating the printed microstructures with thin Au films, the 3D conductive structures offer exceptional stretchability (∼130%), conformability, and stable electrical conductivity (<5% resistance change at 100% tensile strain). This fabrication process can be further applied to directly create complicated 3D interconnect networks of sophisticated active components, as demonstrated with a stretchable capacitive pressure sensor array here. The proposed scheme allows a simple, facile, and scalable manufacturing route for complex, integrated 3D flexible electronic systems.
Persistent Identifierhttp://hdl.handle.net/10722/326264
ISSN
2023 Impact Factor: 8.3
2023 SCImago Journal Rankings: 2.058
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorWang, Yuejiao-
dc.contributor.authorLi, Xiang-
dc.contributor.authorFan, Sufeng-
dc.contributor.authorFeng, Xiaobin-
dc.contributor.authorCao, Ke-
dc.contributor.authorGe, Qi-
dc.contributor.authorGao, Libo-
dc.contributor.authorLu, Yang-
dc.date.accessioned2023-03-09T09:59:19Z-
dc.date.available2023-03-09T09:59:19Z-
dc.date.issued2021-
dc.identifier.citationACS Applied Materials and Interfaces, 2021, v. 13, n. 7, p. 8901-8908-
dc.identifier.issn1944-8244-
dc.identifier.urihttp://hdl.handle.net/10722/326264-
dc.description.abstractStretchable and flexible electronics conformal to human skin or implanted into biological tissues has attracted considerable interest for emerging applications in health monitoring and medical treatment. Although various stretchable materials and structures have been designed and manufactured, most are limited to two-dimensional (2D) layouts for interconnects and active components. Here, by using projection microstereolithography (PμSL)-based three-dimensional (3D) printing, we introduce a versatile microfabrication process to push the manufacturing limit and achieve previously inaccessible 3D geometries at a high resolution of 2 μm. After coating the printed microstructures with thin Au films, the 3D conductive structures offer exceptional stretchability (∼130%), conformability, and stable electrical conductivity (<5% resistance change at 100% tensile strain). This fabrication process can be further applied to directly create complicated 3D interconnect networks of sophisticated active components, as demonstrated with a stretchable capacitive pressure sensor array here. The proposed scheme allows a simple, facile, and scalable manufacturing route for complex, integrated 3D flexible electronic systems.-
dc.languageeng-
dc.relation.ispartofACS Applied Materials and Interfaces-
dc.subject3D microelectronics-
dc.subject3D printing-
dc.subjectAdvanced manufacturing-
dc.subjectFlexible electronics-
dc.subjectStretchable electronics-
dc.titleThree-dimensional stretchable microelectronics by projection microstereolithography (PμSL)-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1021/acsami.0c20162-
dc.identifier.pmid33587597-
dc.identifier.scopuseid_2-s2.0-85101495975-
dc.identifier.volume13-
dc.identifier.issue7-
dc.identifier.spage8901-
dc.identifier.epage8908-
dc.identifier.eissn1944-8252-
dc.identifier.isiWOS:000623228500101-

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