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Article: Erratum: Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors (Appl. Phys. Lett. (1998) 73 (529) (10.1063/1.122069))
Title | Erratum: Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors (Appl. Phys. Lett. (1998) 73 (529) (10.1063/1.122069)) |
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Authors | |
Issue Date | 1998 |
Citation | Applied Physics Letters, 1998, v. 73, n. 10, p. 1448 How to Cite? |
Persistent Identifier | http://hdl.handle.net/10722/334029 |
ISSN | 2023 Impact Factor: 3.5 2023 SCImago Journal Rankings: 0.976 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Nagy, G. | - |
dc.contributor.author | Levy, M. | - |
dc.contributor.author | Scarmozzino, R. | - |
dc.contributor.author | Osgood, R. M. | - |
dc.contributor.author | Dai, H. | - |
dc.contributor.author | Smalley, R. E. | - |
dc.contributor.author | Michaels, C. A. | - |
dc.contributor.author | Sevy, E. T. | - |
dc.contributor.author | Flynn, G. W. | - |
dc.contributor.author | Mclane, G. F. | - |
dc.date.accessioned | 2023-10-20T06:45:02Z | - |
dc.date.available | 2023-10-20T06:45:02Z | - |
dc.date.issued | 1998 | - |
dc.identifier.citation | Applied Physics Letters, 1998, v. 73, n. 10, p. 1448 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10722/334029 | - |
dc.language | eng | - |
dc.relation.ispartof | Applied Physics Letters | - |
dc.title | Erratum: Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors (Appl. Phys. Lett. (1998) 73 (529) (10.1063/1.122069)) | - |
dc.type | Article | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1063/1.122171 | - |
dc.identifier.scopus | eid_2-s2.0-0002673803 | - |
dc.identifier.volume | 73 | - |
dc.identifier.issue | 10 | - |
dc.identifier.spage | 1448 | - |
dc.identifier.epage | - | |
dc.identifier.isi | WOS:000075786000047 | - |