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Article: Erratum: Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors (Appl. Phys. Lett. (1998) 73 (529) (10.1063/1.122069))

TitleErratum: Carbon nanotube tipped atomic force microscopy for measurement of &lt;100 nm etch morphology on semiconductors (Appl. Phys. Lett. (1998) 73 (529) (10.1063/1.122069))
Authors
Issue Date1998
Citation
Applied Physics Letters, 1998, v. 73, n. 10, p. 1448 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/334029
ISSN
2023 Impact Factor: 3.5
2023 SCImago Journal Rankings: 0.976
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorNagy, G.-
dc.contributor.authorLevy, M.-
dc.contributor.authorScarmozzino, R.-
dc.contributor.authorOsgood, R. M.-
dc.contributor.authorDai, H.-
dc.contributor.authorSmalley, R. E.-
dc.contributor.authorMichaels, C. A.-
dc.contributor.authorSevy, E. T.-
dc.contributor.authorFlynn, G. W.-
dc.contributor.authorMclane, G. F.-
dc.date.accessioned2023-10-20T06:45:02Z-
dc.date.available2023-10-20T06:45:02Z-
dc.date.issued1998-
dc.identifier.citationApplied Physics Letters, 1998, v. 73, n. 10, p. 1448-
dc.identifier.issn0003-6951-
dc.identifier.urihttp://hdl.handle.net/10722/334029-
dc.languageeng-
dc.relation.ispartofApplied Physics Letters-
dc.titleErratum: Carbon nanotube tipped atomic force microscopy for measurement of &lt;100 nm etch morphology on semiconductors (Appl. Phys. Lett. (1998) 73 (529) (10.1063/1.122069))-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1063/1.122171-
dc.identifier.scopuseid_2-s2.0-0002673803-
dc.identifier.volume73-
dc.identifier.issue10-
dc.identifier.spage1448-
dc.identifier.epage-
dc.identifier.isiWOS:000075786000047-

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