Microhardness and deformation storage energy density of NiTi thin films

Abstract

The NiTi thin films were deposited onto copper substrates by magnetron sputtering. Tensile tests were carried out on CSS-44100 electron universal test-machine. X-ray diffraction profile Fourier analysis method has been used to study the mechanical properties of deformation NiTi thin films. The surface micrographs of the NiTi thin film were obtained using scanning electron microscopy (SEM). It has been found that the dislocation density and the deformation storage energy density increased with elongation increased. Microhardness was calculated from the dislocation data. The results showed that the microhardness values were not in a good agreement between calculated values and measured values. The oxide layer on the surface of NiTi thin film affects the measured values of microhardness. The Vickers hardness measured values are larger than the calculated values. The experimental results showed that a series of parallel cracks grew in a concerted fashion across the thin film and the cracks were equally spaced.