Nanomanufacturing Automation

Abstract

<p>This chapter reports the key developments for nanomanufacturing automation using atomic force microscopy (AFM) and dielectrophoretic (DEP) approaches, combination of which enhances the assembly efficiency of CNT-based nanodevices. Automated CAD-guided nano-assembly can be performed by an AFM-based nanomanipulator. Although CAD-guided automated manufacturing has been widely studied in the macro-world, nanomanufacturing is challenging. In the nanoenvironments, the nanoobjects are usually distributed on a substrate randomly; thus the nanoenvironment and the available nanoobjects have to be modeled in order to design a feasible nanostructure. Because of the AFM positioning errors induced by the random system uncertainty (e.g., thermal drift), the actual position of AFM tip and each nanoobject have to be estimated by our local scan method, and the localization error has to be overcome by the developed extended non-vector space (ENVS) control approach. The advancement of AFM-based manipulator increases the efficiency and accuracy for assembly of nanoobjects. To fulfill fabricating carbon nanotube (CNT)-based nanodevices automatically, the manufacturing process and key techniques are also discussed. An automated manufacturing system has been especially designed for manufacturing nanodevices. The system integrates a DEP micro chamber into a robotic deposition workstation and increases the yield to form semi-conducting CNTs for manufacturing nanodevices. Therefore, by using the proposed CNT separation, deposition system, and the robotic AFM system for delicate assembly, CNT-based nanodevices with specific and consistent electronic properties can be manufactured automatically and effectively.</p>