Ultimate precision in micromachining due to extreme energy containment by laser pulses down to 5 fs

Abstract

Multiphoton absorption at lowest pulse durations and maximum intensities yield a maximum energy containment in the irradiated material. This reduces the ablation depths below values achieved by conventional sub-picosecond pulse laser systems. The morphology of the ablated areas is controlled mainly by the penetration depth of the laser light. Multi-photon absorption becomes highly efficient below laser pulse durations of 100 fs in dependence on the band gap of the material. Thus, light penetration is minimized and ablation cavities become smooth and narrow.