A piezoelectric-drive micro displacement platform for microscanning

Abstract

In this work, a new type of micro-displacement amplification driving platform is proposed. Piezoelectric stacks are used as the driving elements in the platform. The displacement amplification mechanism is a diamond shaped amplification mechanism based on flexible hinge. Four displacement amplification mechanisms place around the platform to decouple two dimensional motions. Finite element method is used to study the displacement amplification factor, natural frequency and two-dimensional motion displacement correlation. At last, a platform is made to validate the simulation results. The results between test and simulation are basically the same. The micro displacement amplification platform can be used for microscanning. The platform can carry a camera to do microscan, so the camera's pixel resolution can be improved without increasing the camera's size.