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Conference Paper: Analysis and fabrication of a new two dimensional near infrared pincushion silicon based PSD
Title | Analysis and fabrication of a new two dimensional near infrared pincushion silicon based PSD |
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Authors | |
Keywords | Near Infrared Pn Junction Position Sensitive Detector (Psd) Spectral Response |
Issue Date | 2006 |
Publisher | S P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/app/Publications/index.cfm?fuseaction=proceedings |
Citation | 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, Xian, China, 2-5 November 2005. In Proceedings of SPIE - The International Society for Optical Engineering, 2006, v. 6149 How to Cite? |
Abstract | A new photoelectric model of silicon based position sensitive detector (PSD) is built and the formulas of the photocurrent and spectral response are got with it. The effect of every layer thickness and SiO2 thickness to the spectral response is analysis and calculation. The spectral response of PSD is affected by the thickness of p layer mainly at short wavelength and by the thickness of the depletion layer mainly at long wavelength. With the results, a new silicon based near infrared two dimensional pincushion PSD is designed and fabricated. Some necessary tests show that the peak spectral sensitivity of our device is 0.626 A/W at 920nm wavelength. |
Persistent Identifier | http://hdl.handle.net/10722/91146 |
ISSN | 2023 SCImago Journal Rankings: 0.152 |
DC Field | Value | Language |
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dc.contributor.author | Qi, X | en_HK |
dc.contributor.author | Lin, B | en_HK |
dc.contributor.author | Lu, L | en_HK |
dc.contributor.author | Jin, W | en_HK |
dc.contributor.author | Cao, X | en_HK |
dc.date.accessioned | 2010-09-17T10:13:43Z | - |
dc.date.available | 2010-09-17T10:13:43Z | - |
dc.date.issued | 2006 | en_HK |
dc.identifier.citation | 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, Xian, China, 2-5 November 2005. In Proceedings of SPIE - The International Society for Optical Engineering, 2006, v. 6149 | en_HK |
dc.identifier.issn | 0277-786X | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/91146 | - |
dc.description.abstract | A new photoelectric model of silicon based position sensitive detector (PSD) is built and the formulas of the photocurrent and spectral response are got with it. The effect of every layer thickness and SiO2 thickness to the spectral response is analysis and calculation. The spectral response of PSD is affected by the thickness of p layer mainly at short wavelength and by the thickness of the depletion layer mainly at long wavelength. With the results, a new silicon based near infrared two dimensional pincushion PSD is designed and fabricated. Some necessary tests show that the peak spectral sensitivity of our device is 0.626 A/W at 920nm wavelength. | en_HK |
dc.language | eng | en_HK |
dc.publisher | S P I E - International Society for Optical Engineering. The Journal's web site is located at http://www.spie.org/app/Publications/index.cfm?fuseaction=proceedings | en_HK |
dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | en_HK |
dc.subject | Near Infrared | en_HK |
dc.subject | Pn Junction | en_HK |
dc.subject | Position Sensitive Detector (Psd) | en_HK |
dc.subject | Spectral Response | en_HK |
dc.title | Analysis and fabrication of a new two dimensional near infrared pincushion silicon based PSD | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Lin, B:blin@hku.hk | en_HK |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1117/12.674205 | en_HK |
dc.identifier.scopus | eid_2-s2.0-33646397273 | en_HK |
dc.identifier.volume | 6149 | en_HK |
dc.identifier.issnl | 0277-786X | - |