Showing results 17 to 19 of 19
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| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics Proceeding/Conference:Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 | 2005 | 120 | ||
A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 | 108 | ||
Wavelength routing with MEMS switch and a single AWG Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 2005 | 99 |