Showing results 12 to 13 of 13
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Title | Author(s) | Issue Date | |
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SiGe gate oxide prepared at low-temperatures in an electron cyclotron resonance plasma Journal:Applied Physics Letters | 1993 | ||
SiGe pMOSFET's with gate oxide fabricated by microwave electron cyclotron resonance plasma processing Journal:IEEE Electron Device Letters | 1994 |