Browsing by Author Molless, A

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TitleAuthor(s)Issue DateViews
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
Rosenbluth, AEBukofsky, SFonseca, SHibbs, MLai, KMolless, ASingh, RNWong, AKK
2002
121
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