Browsing by Author Molless, AF

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TitleAuthor(s)Issue DateViews
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
Rosenbluth, AEBukofsky, SJHibbs, MSLai, KMolless, AFSingh, RNWong, AKK
2001
113
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