Showing results 1 to 3 of 3
| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
Deep subwavelength nanolithography using localized surface plasmon modes on planar silver mask Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 2005 | |||
Plasmonic lithography Proceeding/Conference:Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications | 2004 | 6 | ||
Sub-100 nm lithography using ultrashort wavelength of surface plasmons Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 2004 | 21 |