Browsing by Author Lai, K

Jump to: 0-9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
Showing results 1 to 19 of 19
TitleAuthor(s)Issue DateViews
 
2007
181
 
2012
213
 
2019
56
 
2019
17
 
2006
216
 
2006
200
 
2021
18
 
2014
85
 
2010
155
 
2011
193
2012
136
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
143
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
136
 
2020
24
 
2012
43
 
2007
64
 
2019
21
 
2016
55
 
2012
36