Browsing by Author Lai, K

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Showing results 1 to 16 of 16
TitleAuthor(s)Issue DateViews
 
2007
106
 
2012
119
 
2019
34
 
2019
10
 
2006
130
 
2006
197
 
2014
87
 
2010
103
 
2011
130
2012
101
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
99
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
91
 
2012
49
 
2007
65
 
2016
36
 
2012
38