Browsing by Author Xu, J.

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Showing results 1 to 5 of 5
TitleAuthor(s)Issue DateViews
2013
 
2007
5
 
2015
24
Stress-assistant selective etching mechanism for lithography-independent nanofabrication
Proceeding/Conference:TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
2009
Ultra-fine nanofabrication by hybrid of energetic ion induced fluidization and stress
Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2011