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Article: Linear microvibromotor for positioning optical components
Title | Linear microvibromotor for positioning optical components |
---|---|
Authors | |
Issue Date | 1996 |
Citation | Journal Of Microelectromechanical Systems, 1996, v. 5 n. 3, p. 159-165 How to Cite? |
Abstract | We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 μm are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device. |
Persistent Identifier | http://hdl.handle.net/10722/148930 |
ISSN | 2023 Impact Factor: 2.5 2023 SCImago Journal Rankings: 0.744 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Daneman, MJ | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.contributor.author | Solgaard, O | en_HK |
dc.contributor.author | Pisano, AP | en_HK |
dc.contributor.author | Lau, KY | en_HK |
dc.contributor.author | Muller, RS | en_HK |
dc.date.accessioned | 2012-06-20T06:16:53Z | - |
dc.date.available | 2012-06-20T06:16:53Z | - |
dc.date.issued | 1996 | en_HK |
dc.identifier.citation | Journal Of Microelectromechanical Systems, 1996, v. 5 n. 3, p. 159-165 | en_HK |
dc.identifier.issn | 1057-7157 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/148930 | - |
dc.description.abstract | We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 μm are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device. | en_HK |
dc.language | eng | en_US |
dc.relation.ispartof | Journal of Microelectromechanical Systems | en_HK |
dc.title | Linear microvibromotor for positioning optical components | en_HK |
dc.type | Article | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1109/84.536622 | en_HK |
dc.identifier.scopus | eid_2-s2.0-0030246625 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-0030246625&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 5 | en_HK |
dc.identifier.issue | 3 | en_HK |
dc.identifier.spage | 159 | en_HK |
dc.identifier.epage | 165 | en_HK |
dc.identifier.isi | WOS:A1996VH43900003 | - |
dc.publisher.place | United States | en_HK |
dc.identifier.scopusauthorid | Daneman, MJ=7003552202 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |
dc.identifier.scopusauthorid | Solgaard, O=7005609097 | en_HK |
dc.identifier.scopusauthorid | Pisano, AP=7103194270 | en_HK |
dc.identifier.scopusauthorid | Lau, KY=7401559989 | en_HK |
dc.identifier.scopusauthorid | Muller, RS=7404245946 | en_HK |
dc.identifier.issnl | 1057-7157 | - |