Kinematics modeling and error analysis of AFM tube scanner

Abstract

For sample-scanning atomic force microscope (AFM), the kinematics of tube scanner-sample-probe system is analyzed and the kinematics model is proposed. The model shows that transverse and longitudinal displacement at the point on sample touched by probe tip is dependent on probe tip offset to scanner axes, applied voltage or nominal scanning size and sample thickness. According to the model, two important errors caused by bow motion are quantitatively analyzed, which demonstrates scanning size error greatly affected by sample thickness and nominal scanning size, while Z axis cross-coupling error greatly affected by probe tip offset and nominal scanning size. Experiments verify the kinematics model and error calculation formulas. In addition, some methods are presented to minimize the errors.