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Conference Paper: Development of CNT based sensor array on a MUMPs chip
Title | Development of CNT based sensor array on a MUMPs chip |
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Authors | |
Keywords | CNT sensors DEP manipulation Micro-robotic spotting Nano batch fabrication Nano manufacturing |
Issue Date | 2006 |
Citation | 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006, 2006, v. 2, p. 798-801 How to Cite? |
Abstract | A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices. © 2006 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/212967 |
DC Field | Value | Language |
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dc.contributor.author | Lai, King W C | - |
dc.contributor.author | Xi, Ning | - |
dc.contributor.author | Li, Wen J. | - |
dc.contributor.author | Kwong, C. P. | - |
dc.date.accessioned | 2015-07-28T04:05:37Z | - |
dc.date.available | 2015-07-28T04:05:37Z | - |
dc.date.issued | 2006 | - |
dc.identifier.citation | 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006, 2006, v. 2, p. 798-801 | - |
dc.identifier.uri | http://hdl.handle.net/10722/212967 | - |
dc.description.abstract | A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices. © 2006 IEEE. | - |
dc.language | eng | - |
dc.relation.ispartof | 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006 | - |
dc.subject | CNT sensors | - |
dc.subject | DEP manipulation | - |
dc.subject | Micro-robotic spotting | - |
dc.subject | Nano batch fabrication | - |
dc.subject | Nano manufacturing | - |
dc.title | Development of CNT based sensor array on a MUMPs chip | - |
dc.type | Conference_Paper | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.scopus | eid_2-s2.0-42549120190 | - |
dc.identifier.volume | 2 | - |
dc.identifier.spage | 798 | - |
dc.identifier.epage | 801 | - |