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Article: Effects of SiNx Interlayer on Characterisation of Amorphous Diamond-Like Carbon Films

TitleEffects of SiNx Interlayer on Characterisation of Amorphous Diamond-Like Carbon Films
Authors
Chen, QShih, KShen, YHLuo, YLi, R
KeywordsDiamond like carbon films
Magnetron sputtering
Raman spectra
Scanning electron microscopy
SiNx interlayer
Issue Date2015
Citation
Materials Science and Technology, 2015, v. 31, p. 703-708 How to Cite?
DOI: http://dx.doi.org/10.1179/1743284714Y.0000000646
Persistent Identifierhttp://hdl.handle.net/10722/215251
ISSN
0267-0836
2021 Impact Factor: 2.060
2020 SCImago Journal Rankings: 0.606
ISI Accession Number ID
WOS:000348343000009

 

DC FieldValueLanguage
dc.contributor.authorChen, Q-
dc.contributor.authorShih, K-
dc.contributor.authorShen, YH-
dc.contributor.authorLuo, Y-
dc.contributor.authorLi, R-
dc.date.accessioned2015-08-21T13:19:11Z-
dc.date.available2015-08-21T13:19:11Z-
dc.date.issued2015-
dc.identifier.citationMaterials Science and Technology, 2015, v. 31, p. 703-708-
dc.identifier.issn0267-0836-
dc.identifier.urihttp://hdl.handle.net/10722/215251-
dc.languageeng-
dc.relation.ispartofMaterials Science and Technology-
dc.subjectDiamond like carbon films-
dc.subjectMagnetron sputtering-
dc.subjectRaman spectra-
dc.subjectScanning electron microscopy-
dc.subjectSiNx interlayer-
dc.titleEffects of SiNx Interlayer on Characterisation of Amorphous Diamond-Like Carbon Films-
dc.typeArticle-
dc.identifier.emailShih, K: kshih@hku.hk-
dc.identifier.authorityShih, K=rp00167-
dc.identifier.doi10.1179/1743284714Y.0000000646-
dc.identifier.scopuseid_2-s2.0-84921728823-
dc.identifier.hkuros250085-
dc.identifier.volume31-
dc.identifier.spage703-
dc.identifier.epage708-
dc.identifier.eissn1743-2847-
dc.identifier.isiWOS:000348343000009-
dc.identifier.issnl0267-0836-

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