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Article: A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems

TitleA performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems
Authors
Issue Date2021
Citation
Journal of Manufacturing Systems, 2021, v. 58, p. 316-334 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/295544
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorWu, LH-
dc.contributor.authorZhang, ZW-
dc.contributor.authorZhang, J-
dc.contributor.authorZhong, R-
dc.contributor.authorWang, JL-
dc.date.accessioned2021-01-25T11:16:22Z-
dc.date.available2021-01-25T11:16:22Z-
dc.date.issued2021-
dc.identifier.citationJournal of Manufacturing Systems, 2021, v. 58, p. 316-334-
dc.identifier.urihttp://hdl.handle.net/10722/295544-
dc.languageeng-
dc.relation.ispartofJournal of Manufacturing Systems-
dc.titleA performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems-
dc.typeArticle-
dc.identifier.emailZhong, R: zhongzry@hku.hk-
dc.identifier.authorityZhong, R=rp02116-
dc.identifier.doi10.1016/j.jmsy.2020.12.006-
dc.identifier.hkuros320956-
dc.identifier.volume58-
dc.identifier.spage316-
dc.identifier.epage334-
dc.identifier.isiWOS:000620666400002-

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