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Conference Paper: Material deposition with spatial thickness variation for reflective color filter

TitleMaterial deposition with spatial thickness variation for reflective color filter
Authors
Issue Date2020
Citation
Optics InfoBase Conference Papers, 2020, v. Part F183-CLEO-SI 2020, article no. SW3F.5 How to Cite?
AbstractA new material deposition method to pattern 2D structures with spatial thickness variation using single fixed shadow mask is demonstrated. The method is applied to fabricate multispectral reflective color filter arrays of high customizability.
Persistent Identifierhttp://hdl.handle.net/10722/318879

 

DC FieldValueLanguage
dc.contributor.authorLi, Xinhao-
dc.contributor.authorTan, Zheng Jie-
dc.contributor.authorFang, Nicholas X.-
dc.date.accessioned2022-10-11T12:24:46Z-
dc.date.available2022-10-11T12:24:46Z-
dc.date.issued2020-
dc.identifier.citationOptics InfoBase Conference Papers, 2020, v. Part F183-CLEO-SI 2020, article no. SW3F.5-
dc.identifier.urihttp://hdl.handle.net/10722/318879-
dc.description.abstractA new material deposition method to pattern 2D structures with spatial thickness variation using single fixed shadow mask is demonstrated. The method is applied to fabricate multispectral reflective color filter arrays of high customizability.-
dc.languageeng-
dc.relation.ispartofOptics InfoBase Conference Papers-
dc.titleMaterial deposition with spatial thickness variation for reflective color filter-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1364/CLEO_SI.2020.SW3F.5-
dc.identifier.scopuseid_2-s2.0-85095457189-
dc.identifier.volumePart F183-CLEO-SI 2020-
dc.identifier.spagearticle no. SW3F.5-
dc.identifier.epagearticle no. SW3F.5-

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