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Article: Deep level transient spectroscopic study of neutron-irradiated n-type 6H-SiC

TitleDeep level transient spectroscopic study of neutron-irradiated n-type 6H-SiC
Authors
Chen, XDFung, SLing, CCBeling, CDGong, M
KeywordsPhysics engineering
Issue Date2003
PublisherAmerican Institute of Physics. The Journal's web site is located at http://jap.aip.org/jap/staff.jsp
Citation
Journal of Applied Physics, 2003, v. 94 n. 5, p. 3004-3010 How to Cite?
DOI: http://dx.doi.org/10.1063/1.1598629
AbstractA study of neutron-irradiated n-type 6H-SiC using deep level transient spectroscopy was presented. 100- 1600°C isochronal annealing was performed on the as-irradiated samples with each of the annealing steps to investigate the thermal annealing behavior. Thermal generation of deep levels NE1- NE4 at annealing temperatures above 1400°C was observed.
Persistent Identifierhttp://hdl.handle.net/10722/42218
ISSN
0021-8979
2021 Impact Factor: 2.877
2020 SCImago Journal Rankings: 0.699
ISI Accession Number ID
WOS:000184844200031
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorChen, XDen_HK
dc.contributor.authorFung, Sen_HK
dc.contributor.authorLing, CCen_HK
dc.contributor.authorBeling, CDen_HK
dc.contributor.authorGong, Men_HK
dc.date.accessioned2007-01-08T02:31:50Z-
dc.date.available2007-01-08T02:31:50Z-
dc.date.issued2003en_HK
dc.identifier.citationJournal of Applied Physics, 2003, v. 94 n. 5, p. 3004-3010-
dc.identifier.issn0021-8979en_HK
dc.identifier.urihttp://hdl.handle.net/10722/42218-
dc.description.abstractA study of neutron-irradiated n-type 6H-SiC using deep level transient spectroscopy was presented. 100- 1600°C isochronal annealing was performed on the as-irradiated samples with each of the annealing steps to investigate the thermal annealing behavior. Thermal generation of deep levels NE1- NE4 at annealing temperatures above 1400°C was observed.en_HK
dc.format.extent112126 bytes-
dc.format.extent9781 bytes-
dc.format.mimetypeapplication/pdf-
dc.format.mimetypetext/plain-
dc.languageengen_HK
dc.publisherAmerican Institute of Physics. The Journal's web site is located at http://jap.aip.org/jap/staff.jspen_HK
dc.relation.ispartofJournal of Applied Physicsen_HK
dc.rightsCopyright 2003 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics, 2003, v. 94 n. 5, p. 3004-3010 and may be found at https://doi.org/10.1063/1.1598629-
dc.subjectPhysics engineeringen_HK
dc.titleDeep level transient spectroscopic study of neutron-irradiated n-type 6H-SiCen_HK
dc.typeArticleen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0021-8979&volume=94&issue=5&spage=3004&epage=3010&date=2003&atitle=Deep+level+transient+spectroscopic+study+of+neutron-irradiated+n-type+6H–SiCen_HK
dc.identifier.emailFung, S: sfung@hku.hken_HK
dc.identifier.emailLing, CC: ccling@hkucc.hku.hken_HK
dc.identifier.emailBeling, CD: cdbeling@hkucc.hku.hken_HK
dc.identifier.authorityFung, S=rp00695en_HK
dc.identifier.authorityLing, CC=rp00747en_HK
dc.identifier.authorityBeling, CD=rp00660en_HK
dc.description.naturepublished_or_final_versionen_HK
dc.identifier.doi10.1063/1.1598629en_HK
dc.identifier.scopuseid_2-s2.0-0141608047en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0141608047&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume94en_HK
dc.identifier.issue5en_HK
dc.identifier.spage3004en_HK
dc.identifier.epage3010en_HK
dc.identifier.isiWOS:000184844200031-
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridChen, XD=26642908200en_HK
dc.identifier.scopusauthoridFung, S=7201970040en_HK
dc.identifier.scopusauthoridLing, CC=13310239300en_HK
dc.identifier.scopusauthoridBeling, CD=7005864180en_HK
dc.identifier.scopusauthoridGong, M=9273057400en_HK
dc.identifier.issnl0021-8979-

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