Showing results 12 to 15 of 15
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Title | Author(s) | Issue Date | |
---|---|---|---|
Quantized patterning using nanoimprinted blanks Journal:Nanotechnology | 2009 | ||
Self-limited self-perfection by liquefaction for sub-20nm trench/line fabrication Journal:Nanotechnology | 2009 | ||
2010 | |||
2011 |