Showing results 2 to 3 of 3
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| Title | Author(s) | Issue Date | |
|---|---|---|---|
Fabrication of biomimetic 3-D structured diaphragms Proceeding/Conference:Sensors and Actuators, A: Physical | 2002 | ||
Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate Journal:Journal of Micromechanics and Microengineering | 2002 |