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	Title	Author(s)	Issue Date
	Silicon Ion Implant Activation in β-(Al<inf>0.2</inf>Ga<inf>0.8</inf>)<inf>2</inf>O<inf>3</inf> Journal:Journal of Electronic Materials	Jacobs, Alan G.Spencer, Joseph A.Tadjer, Marko J.Feigelson, Boris N.Lamb, Abbey Lee, Ming Hsun Peterson, Rebecca L.Alema, Fikadu Osinsky, Andrei Zhang, Yuhao Hobart, Karl D.Anderson, Travis J.	2024

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