Showing results 1 to 2 of 2
Title | Author(s) | Issue Date | |
---|---|---|---|
Mechanical behavior of nano-scale polymeric patterns fabricated by UV-NIL Proceeding/Conference:Proceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics | 2005 | ||
Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures Journal:Electronics Letters | 2008 |