Showing results 1 to 4 of 4
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Deep subwavelength nanolithography using localized surface plasmon modes on planar silver mask Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 2005 | ||
Plasmonic lithography Proceeding/Conference:Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications | 2004 | ||
Sub-100 nm lithography using ultrashort wavelength of surface plasmons Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 2004 | ||
Subwavelength nanolithography using surface plasmons Proceeding/Conference:Proceedings of the IEEE Conference on Nanotechnology | 2003 |