Showing results 1 to 1 of 1
Title | Author(s) | Issue Date | |
---|---|---|---|
RTP formed oxynitride via direct nitridation in N 2 Proceeding/Conference:Proceedings of the IEEE Hong Kong Electron Devices Meeting | 2000 |
Title | Author(s) | Issue Date | |
---|---|---|---|
RTP formed oxynitride via direct nitridation in N 2 Proceeding/Conference:Proceedings of the IEEE Hong Kong Electron Devices Meeting | 2000 |