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Title | Author(s) | Issue Date | |
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Ultralow-k Amorphous Boron Nitride Based on Hexagonal Ring Stacking Framework for 300 mm Silicon Technology Platform Journal:Advanced Materials Technologies | 2022 |
Title | Author(s) | Issue Date | |
---|---|---|---|
Ultralow-k Amorphous Boron Nitride Based on Hexagonal Ring Stacking Framework for 300 mm Silicon Technology Platform Journal:Advanced Materials Technologies | 2022 |