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Conference Paper: Role of Teflon and LiCl on the humidity-sensing properties of porous anodized alumina film

TitleRole of Teflon and LiCl on the humidity-sensing properties of porous anodized alumina film
Authors
Chakraborty, SupraticLai, PTChakraborty, Chaitali
Issue Date2000
Citation
Proceedings Of The Ieee Hong Kong Electron Devices Meeting, 2000, p. 78-81 How to Cite?
AbstractThe electrical properties of capacitive humidity sensors, based on an aluminum film anodized in phosphoric acid, are investigated. The properties of Teflon-deposited or LiCl-coated porous alumina film are also measured. It is found that sensitivity of porous alumina film increases after Teflon or LiCl deposition. Moreover, the Teflon-deposited alumina sensor exhibits shorter response time.
Persistent Identifierhttp://hdl.handle.net/10722/158299

 

DC FieldValueLanguage
dc.contributor.authorChakraborty, Supraticen_US
dc.contributor.authorLai, PTen_US
dc.contributor.authorChakraborty, Chaitalien_US
dc.date.accessioned2012-08-08T08:58:58Z-
dc.date.available2012-08-08T08:58:58Z-
dc.date.issued2000en_US
dc.identifier.citationProceedings Of The Ieee Hong Kong Electron Devices Meeting, 2000, p. 78-81en_US
dc.identifier.urihttp://hdl.handle.net/10722/158299-
dc.description.abstractThe electrical properties of capacitive humidity sensors, based on an aluminum film anodized in phosphoric acid, are investigated. The properties of Teflon-deposited or LiCl-coated porous alumina film are also measured. It is found that sensitivity of porous alumina film increases after Teflon or LiCl deposition. Moreover, the Teflon-deposited alumina sensor exhibits shorter response time.en_US
dc.languageengen_US
dc.relation.ispartofProceedings of the IEEE Hong Kong Electron Devices Meetingen_US
dc.titleRole of Teflon and LiCl on the humidity-sensing properties of porous anodized alumina filmen_US
dc.typeConference_Paperen_US
dc.identifier.emailLai, PT:laip@eee.hku.hken_US
dc.identifier.authorityLai, PT=rp00130en_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0034481932en_US
dc.identifier.spage78en_US
dc.identifier.epage81en_US
dc.identifier.scopusauthoridChakraborty, Supratic=35577738500en_US
dc.identifier.scopusauthoridLai, PT=7202946460en_US
dc.identifier.scopusauthoridChakraborty, Chaitali=7005340410en_US

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