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Conference Paper: A study on a metal-insulator-silicon hydrogen sensor with LaTiON as gate insulator
Title | A study on a metal-insulator-silicon hydrogen sensor with LaTiON as gate insulator |
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Authors | |
Keywords | Schottky-diode Hydrogen sensor Silicon Gate insulator LaTiON |
Issue Date | 2012 |
Publisher | Elsevier BV. The Journal's web site is located at http://www.elsevier.com/wps/find/journaldescription.cws_home/714716/description#description |
Citation | The 2012 International Conference on Solid State Devices and Materials Science (SSDMS 2012), Macao, China, 1-2 April 2012. In Physics Procedia, 2012, v. 25, p. 50-55 How to Cite? |
Abstract | Amongst the many types of semiconductor hydrogen sensors currently studied, Schottky-diodes are preferable as they are simple to fabricate and exhibit high sensitivities and fast response times. To enhance the sensor's performance, a gate insulator is deposited in order to minimize interfacial diffusion between the electrode and the substrate. In this work, we present a novel MIS Schottky-diode hydrogen sensor with LaTiON as gate insulator. The hydrogen-sensing properties (sensitivity, barrier height variation) were examined from room temperature (RT) to 150 °C and its sensitivity was found to reach 2.5 at 100 °C. Moreover, the hydrogen reaction kinetics were studied and these results showed that the sensor was very sensitive to hydrogen ambient. |
Persistent Identifier | http://hdl.handle.net/10722/191620 |
ISSN | 2020 SCImago Journal Rankings: 0.260 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Chen, G | en_US |
dc.contributor.author | Yu, J | en_US |
dc.contributor.author | Lai, PT | en_US |
dc.date.accessioned | 2013-10-15T07:14:42Z | - |
dc.date.available | 2013-10-15T07:14:42Z | - |
dc.date.issued | 2012 | en_US |
dc.identifier.citation | The 2012 International Conference on Solid State Devices and Materials Science (SSDMS 2012), Macao, China, 1-2 April 2012. In Physics Procedia, 2012, v. 25, p. 50-55 | en_US |
dc.identifier.issn | 1875-3892 | - |
dc.identifier.uri | http://hdl.handle.net/10722/191620 | - |
dc.description.abstract | Amongst the many types of semiconductor hydrogen sensors currently studied, Schottky-diodes are preferable as they are simple to fabricate and exhibit high sensitivities and fast response times. To enhance the sensor's performance, a gate insulator is deposited in order to minimize interfacial diffusion between the electrode and the substrate. In this work, we present a novel MIS Schottky-diode hydrogen sensor with LaTiON as gate insulator. The hydrogen-sensing properties (sensitivity, barrier height variation) were examined from room temperature (RT) to 150 °C and its sensitivity was found to reach 2.5 at 100 °C. Moreover, the hydrogen reaction kinetics were studied and these results showed that the sensor was very sensitive to hydrogen ambient. | - |
dc.language | eng | en_US |
dc.publisher | Elsevier BV. The Journal's web site is located at http://www.elsevier.com/wps/find/journaldescription.cws_home/714716/description#description | - |
dc.relation.ispartof | Physics Procedia | en_US |
dc.subject | Schottky-diode | - |
dc.subject | Hydrogen sensor | - |
dc.subject | Silicon | - |
dc.subject | Gate insulator | - |
dc.subject | LaTiON | - |
dc.title | A study on a metal-insulator-silicon hydrogen sensor with LaTiON as gate insulator | en_US |
dc.type | Conference_Paper | en_US |
dc.identifier.email | Yu, J: jcwyu@hku.hk | en_US |
dc.identifier.email | Lai, PT: laip@eee.hku.hk | en_US |
dc.identifier.authority | Lai, PT=rp00130 | en_US |
dc.description.nature | link_to_OA_fulltext | - |
dc.identifier.doi | 10.1016/j.phpro.2012.03.048 | - |
dc.identifier.hkuros | 225768 | en_US |
dc.identifier.volume | 25 | - |
dc.identifier.spage | 50 | - |
dc.identifier.epage | 55 | - |
dc.identifier.isi | WOS:000305960300008 | - |
dc.publisher.place | Netherlands | en_US |
dc.customcontrol.immutable | sml 131106 | - |
dc.identifier.issnl | 1875-3892 | - |