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Conference Paper: HfTiON as charge-trapping layer for nonvolatile memory applications

TitleHfTiON as charge-trapping layer for nonvolatile memory applications
Authors
Huang, XDLai, PT
Issue Date2012
PublisherElectrochemical Society, Inc.
Citation
221st ECS Meeting, Seattle, WA, USA, 6-10 May 2012, Dielectrics for Nanosystems: Poster Session (May 8 2012 6:00PM), abstract no. 708 How to Cite?
DescriptionIn Symposia: Dielectric and Semiconductor Materials, Devices, and Processing: E1 - Dielectrics for Nanosystems 5: Materials Science, Processing, Reliability, and Manufacturing: Dielectrics for Nanosystems: Poster Session (May 8 2012 6:00PM)
The abstract can be viewed at http://ma.ecsdl.org/content/MA2012-01/16/708.full.pdf+html
Persistent Identifierhttp://hdl.handle.net/10722/191621

 

DC FieldValueLanguage
dc.contributor.authorHuang, XDen_US
dc.contributor.authorLai, PTen_US
dc.date.accessioned2013-10-15T07:14:42Z-
dc.date.available2013-10-15T07:14:42Z-
dc.date.issued2012en_US
dc.identifier.citation221st ECS Meeting, Seattle, WA, USA, 6-10 May 2012, Dielectrics for Nanosystems: Poster Session (May 8 2012 6:00PM), abstract no. 708en_US
dc.identifier.urihttp://hdl.handle.net/10722/191621-
dc.descriptionIn Symposia: Dielectric and Semiconductor Materials, Devices, and Processing: E1 - Dielectrics for Nanosystems 5: Materials Science, Processing, Reliability, and Manufacturing: Dielectrics for Nanosystems: Poster Session (May 8 2012 6:00PM)-
dc.descriptionThe abstract can be viewed at http://ma.ecsdl.org/content/MA2012-01/16/708.full.pdf+html-
dc.languageengen_US
dc.publisherElectrochemical Society, Inc.-
dc.relation.ispartofECS Meetingen_US
dc.rightsECS Meeting Abstracts. Copyright © Electrochemical Society, Inc..-
dc.titleHfTiON as charge-trapping layer for nonvolatile memory applicationsen_US
dc.typeConference_Paperen_US
dc.identifier.emailLai, PT: laip@eee.hku.hken_US
dc.identifier.authorityLai, PT=rp00130en_US
dc.identifier.hkuros225769en_US
dc.identifier.spageabstract no. 708-
dc.identifier.epageabstract no. 708-
dc.publisher.placeUnited Statesen_US

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