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- Publisher Website: 10.1364/OE.23.026919
- Scopus: eid_2-s2.0-84957057339
- WOS: WOS:000366574400004
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Article: Sparse nonlinear inverse imaging for shot count reduction in inverse lithography
Title | Sparse nonlinear inverse imaging for shot count reduction in inverse lithography |
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Authors | |
Issue Date | 2015 |
Publisher | Optical Society of America. The Journal's web site is located at http://www.opticsexpress.org |
Citation | Optics Express, 2015, v. 23 n. 21, p. 26919-26931 How to Cite? |
Persistent Identifier | http://hdl.handle.net/10722/231914 |
ISSN | 2023 Impact Factor: 3.2 2023 SCImago Journal Rankings: 0.998 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | WU, X | - |
dc.contributor.author | Liu, S | - |
dc.contributor.author | Lv, W | - |
dc.contributor.author | Lam, EYM | - |
dc.date.accessioned | 2016-09-20T05:26:20Z | - |
dc.date.available | 2016-09-20T05:26:20Z | - |
dc.date.issued | 2015 | - |
dc.identifier.citation | Optics Express, 2015, v. 23 n. 21, p. 26919-26931 | - |
dc.identifier.issn | 1094-4087 | - |
dc.identifier.uri | http://hdl.handle.net/10722/231914 | - |
dc.language | eng | - |
dc.publisher | Optical Society of America. The Journal's web site is located at http://www.opticsexpress.org | - |
dc.relation.ispartof | Optics Express | - |
dc.rights | Optics Express. Copyright © Optical Society of America. | - |
dc.title | Sparse nonlinear inverse imaging for shot count reduction in inverse lithography | - |
dc.type | Article | - |
dc.identifier.email | Lam, EYM: elam@eee.hku.hk | - |
dc.identifier.authority | Lam, EYM=rp00131 | - |
dc.identifier.doi | 10.1364/OE.23.026919 | - |
dc.identifier.scopus | eid_2-s2.0-84957057339 | - |
dc.identifier.hkuros | 264164 | - |
dc.identifier.volume | 23 | - |
dc.identifier.issue | 21 | - |
dc.identifier.spage | 26919 | - |
dc.identifier.epage | 26931 | - |
dc.identifier.isi | WOS:000366574400004 | - |
dc.publisher.place | United States | - |
dc.identifier.issnl | 1094-4087 | - |