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- Publisher Website: 10.1117/12.506644
- Scopus: eid_2-s2.0-1242263782
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Conference Paper: Stiction Problems in Releasing of 3D Microstructures and Its Solution
| Title | Stiction Problems in Releasing of 3D Microstructures and Its Solution |
|---|---|
| Authors | |
| Keywords | Photo polymerization Surface tension Micro stereolithography MEMS Polymer |
| Issue Date | 2003 |
| Citation | Proceedings of SPIE - The International Society for Optical Engineering, 2003, v. 5225, p. 40-48 How to Cite? |
| Abstract | Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion. |
| Persistent Identifier | http://hdl.handle.net/10722/256889 |
| ISSN | 2020 SCImago Journal Rankings: 0.192 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Wu, Dongmin | - |
| dc.contributor.author | Fang, Nicholas | - |
| dc.contributor.author | Sun, Cheng | - |
| dc.contributor.author | Zhang, Xiang | - |
| dc.date.accessioned | 2018-07-24T08:58:15Z | - |
| dc.date.available | 2018-07-24T08:58:15Z | - |
| dc.date.issued | 2003 | - |
| dc.identifier.citation | Proceedings of SPIE - The International Society for Optical Engineering, 2003, v. 5225, p. 40-48 | - |
| dc.identifier.issn | 0277-786X | - |
| dc.identifier.uri | http://hdl.handle.net/10722/256889 | - |
| dc.description.abstract | Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | - |
| dc.subject | Photo polymerization | - |
| dc.subject | Surface tension | - |
| dc.subject | Micro stereolithography | - |
| dc.subject | MEMS | - |
| dc.subject | Polymer | - |
| dc.title | Stiction Problems in Releasing of 3D Microstructures and Its Solution | - |
| dc.type | Conference_Paper | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.doi | 10.1117/12.506644 | - |
| dc.identifier.scopus | eid_2-s2.0-1242263782 | - |
| dc.identifier.volume | 5225 | - |
| dc.identifier.spage | 40 | - |
| dc.identifier.epage | 48 | - |