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Conference Paper: Design and microfabrication of terahertz magnetic metamaterials

TitleDesign and microfabrication of terahertz magnetic metamaterials
Authors
Yen, Ta JenFang, NicholasZhang, Xiang
Issue Date2003
Citation
American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS), 2003, v. 5, p. 37-40 How to Cite?
DOI: http://dx.doi.org/10.1115/imece2003-41475
AbstractIn this work, we introduce the simulation design and microfabrication of a class of magnetic metamaterials with critical dimension of 2-6 microns and lattice constant of 30-50 microns. These metamaterials will exhibit magnetic response at 0.5-2THz. To optimize the design variables, we conducted a series of Taguchi experiments and a quasi-linear relationship of resonant frequency is established upon each design parameter. We are currently characterizing the first generation of the fabricated magnetic metamaterials using Fourier Transformed Infrared spectroscopy.
Persistent Identifierhttp://hdl.handle.net/10722/256903

 

DC FieldValueLanguage
dc.contributor.authorYen, Ta Jen-
dc.contributor.authorFang, Nicholas-
dc.contributor.authorZhang, Xiang-
dc.date.accessioned2018-07-24T08:58:17Z-
dc.date.available2018-07-24T08:58:17Z-
dc.date.issued2003-
dc.identifier.citationAmerican Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS), 2003, v. 5, p. 37-40-
dc.identifier.urihttp://hdl.handle.net/10722/256903-
dc.description.abstractIn this work, we introduce the simulation design and microfabrication of a class of magnetic metamaterials with critical dimension of 2-6 microns and lattice constant of 30-50 microns. These metamaterials will exhibit magnetic response at 0.5-2THz. To optimize the design variables, we conducted a series of Taguchi experiments and a quasi-linear relationship of resonant frequency is established upon each design parameter. We are currently characterizing the first generation of the fabricated magnetic metamaterials using Fourier Transformed Infrared spectroscopy.-
dc.languageeng-
dc.relation.ispartofAmerican Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)-
dc.titleDesign and microfabrication of terahertz magnetic metamaterials-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1115/imece2003-41475-
dc.identifier.scopuseid_2-s2.0-1942520369-
dc.identifier.volume5-
dc.identifier.spage37-
dc.identifier.epage40-

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