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Article: Effects of annealing on electrical performance of multilayer MoS2 transistors with atomic layer deposited HfO2 gate dielectric

TitleEffects of annealing on electrical performance of multilayer MoS2 transistors with atomic layer deposited HfO2 gate dielectric
Authors
Issue Date2016
PublisherIOP Publishing, published in association with Japan Society of Applied Physics. The Journal's web site is located at http://iopscience.iop.org/1882-0786/
Citation
Applied Physics Express, 2016, v. 9, p. 095202 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/261758
ISSN
2021 Impact Factor: 2.819
2020 SCImago Journal Rankings: 0.911
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorWen, M-
dc.contributor.authorXu, JP-
dc.contributor.authorLiu, L-
dc.contributor.authorLai, PT-
dc.contributor.authorTang, WM-
dc.date.accessioned2018-09-28T04:47:20Z-
dc.date.available2018-09-28T04:47:20Z-
dc.date.issued2016-
dc.identifier.citationApplied Physics Express, 2016, v. 9, p. 095202-
dc.identifier.issn1882-0778-
dc.identifier.urihttp://hdl.handle.net/10722/261758-
dc.languageeng-
dc.publisherIOP Publishing, published in association with Japan Society of Applied Physics. The Journal's web site is located at http://iopscience.iop.org/1882-0786/-
dc.relation.ispartofApplied Physics Express-
dc.rightsApplied Physics Express. Copyright © IOP Publishing, published in association with Japan Society of Applied Physics.-
dc.rightsThis is an author-created, un-copyedited version of an article published in [insert name of journal]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://dx.doi.org/[insert DOI].-
dc.titleEffects of annealing on electrical performance of multilayer MoS2 transistors with atomic layer deposited HfO2 gate dielectric-
dc.typeArticle-
dc.identifier.emailLai, PT: laip@eee.hku.hk-
dc.identifier.authorityLai, PT=rp00130-
dc.identifier.doi10.7567/APEX.9.095202-
dc.identifier.scopuseid_2-s2.0-84987678265-
dc.identifier.hkuros292220-
dc.identifier.volume9-
dc.identifier.spage095202-
dc.identifier.epage095202-
dc.identifier.isiWOS:000383983700021-
dc.publisher.placeUnited Kingdom-
dc.identifier.issnl1882-0778-

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