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- Publisher Website: 10.1109/TRANSDUCERS.2011.5969204
- Scopus: eid_2-s2.0-80052107068
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Conference Paper: Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers
Title | Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers |
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Authors | |
Keywords | Intercoupled dual-microcantilevers Out-of-phase vibration Mass sensor Amplitude ratio |
Issue Date | 2011 |
Citation | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, p. 2010-2013 How to Cite? |
Abstract | This paper reports a kind of intercoupled silicon dual-microcantilevers for ultrasensitive mass detection based on the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the dual-cantilevers. The structural intercoupling of the dual-cantilevers arises from the coupling overhang connecting them at the base. The whole structure operation is excited by a piezoactuator under ambient conditions. Experimental results indicate that the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the structure is linear as a function of added mass, and it is more than one order of magnitude greater than the relative change in resonance frequency of in-phase vibration eigenstate. © 2011 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/286860 |
DC Field | Value | Language |
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dc.contributor.author | Wang, J. | - |
dc.contributor.author | Feng, B. | - |
dc.contributor.author | Li, C. | - |
dc.contributor.author | Zhang, F. Q. | - |
dc.contributor.author | Ding, K. | - |
dc.contributor.author | Wu, W. G. | - |
dc.date.accessioned | 2020-09-07T11:45:52Z | - |
dc.date.available | 2020-09-07T11:45:52Z | - |
dc.date.issued | 2011 | - |
dc.identifier.citation | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, p. 2010-2013 | - |
dc.identifier.uri | http://hdl.handle.net/10722/286860 | - |
dc.description.abstract | This paper reports a kind of intercoupled silicon dual-microcantilevers for ultrasensitive mass detection based on the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the dual-cantilevers. The structural intercoupling of the dual-cantilevers arises from the coupling overhang connecting them at the base. The whole structure operation is excited by a piezoactuator under ambient conditions. Experimental results indicate that the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the structure is linear as a function of added mass, and it is more than one order of magnitude greater than the relative change in resonance frequency of in-phase vibration eigenstate. © 2011 IEEE. | - |
dc.language | eng | - |
dc.relation.ispartof | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | - |
dc.subject | Intercoupled dual-microcantilevers | - |
dc.subject | Out-of-phase vibration | - |
dc.subject | Mass sensor | - |
dc.subject | Amplitude ratio | - |
dc.title | Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers | - |
dc.type | Conference_Paper | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1109/TRANSDUCERS.2011.5969204 | - |
dc.identifier.scopus | eid_2-s2.0-80052107068 | - |
dc.identifier.spage | 2010 | - |
dc.identifier.epage | 2013 | - |