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- Publisher Website: 10.1109/IROS.1991.174656
- Scopus: eid_2-s2.0-0026294298
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Conference Paper: Electrostatic micro manipulator with 6 D.O.F
| Title | Electrostatic micro manipulator with 6 D.O.F |
|---|---|
| Authors | |
| Issue Date | 1991 |
| Citation | IEEE/RSJ International Workshop on Intelligent Robots and Systems '91 (IROS '91), Osaka, Japan, 3-5 November 1991. In Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91, 1991, v. 2, p. 1169-1174 How to Cite? |
| Abstract | In this paper, a new mechanism of an electrostatic micromanipulator which has 6 D.O.F is proposed. Its main features are summarized as follows. First it can be constructed very compact, since the actuator system is fabricated and assembled through the photoetching process. Second it can move along three axes (6 D.O.F), and rotate around each axis and has high resolution with no backlash. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V. A simulation result for dynamics is shown to estimate the motion of the micromanipulator. |
| Persistent Identifier | http://hdl.handle.net/10722/302582 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Fukuda, Toshio | - |
| dc.contributor.author | Fujiyoshi, Motohiro | - |
| dc.contributor.author | Kosuge, Kazuhiro | - |
| dc.contributor.author | Arai, Fumihito | - |
| dc.date.accessioned | 2021-09-07T08:42:11Z | - |
| dc.date.available | 2021-09-07T08:42:11Z | - |
| dc.date.issued | 1991 | - |
| dc.identifier.citation | IEEE/RSJ International Workshop on Intelligent Robots and Systems '91 (IROS '91), Osaka, Japan, 3-5 November 1991. In Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91, 1991, v. 2, p. 1169-1174 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/302582 | - |
| dc.description.abstract | In this paper, a new mechanism of an electrostatic micromanipulator which has 6 D.O.F is proposed. Its main features are summarized as follows. First it can be constructed very compact, since the actuator system is fabricated and assembled through the photoetching process. Second it can move along three axes (6 D.O.F), and rotate around each axis and has high resolution with no backlash. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V. A simulation result for dynamics is shown to estimate the motion of the micromanipulator. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91 | - |
| dc.title | Electrostatic micro manipulator with 6 D.O.F | - |
| dc.type | Conference_Paper | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.doi | 10.1109/IROS.1991.174656 | - |
| dc.identifier.scopus | eid_2-s2.0-0026294298 | - |
| dc.identifier.volume | 2 | - |
| dc.identifier.spage | 1169 | - |
| dc.identifier.epage | 1174 | - |