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Conference Paper: Electrostatic micro/nano manipulator with 6 D.O.F
| Title | Electrostatic micro/nano manipulator with 6 D.O.F |
|---|---|
| Authors | |
| Issue Date | 1991 |
| Publisher | American Society of Mechanical Engineers. |
| Citation | The Winter Annual Meeting of the American Society of Mechanical Engineers 1991, Atlanta, GA, 1-6 December 1991. In Micromechanical sensors, actuators and systems: presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, George, December 1-6, 1991, 1991, p. 197-202 How to Cite? |
| Abstract | In this paper, we propose mechanism of an electrostatic micromanipulator with six-degree-of-freedom (6 D.O.F) and describe static characteristics of the prototype micromanipulator. Its main features are summarized as follows: (1) it is structurally very compact, since the actuator system is fabricated and assembled through the photoetching process; (2) the manipulator can move along three axes, and can also rotate around each axis(6 D.O.F). No backlash exists and it has subnanometer resolution. The sensing method of the tip motion is described and the static characteristics of the tip motion is measured. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V. |
| Persistent Identifier | http://hdl.handle.net/10722/302583 |
| ISBN | |
| Series/Report no. | DSC (Series) ; 32 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Fukuda, Toshio | - |
| dc.contributor.author | Fujiyoshi, Motohiro | - |
| dc.contributor.author | Kosuge, Kazuhiro | - |
| dc.contributor.author | Arai, Fumihito | - |
| dc.date.accessioned | 2021-09-07T08:42:11Z | - |
| dc.date.available | 2021-09-07T08:42:11Z | - |
| dc.date.issued | 1991 | - |
| dc.identifier.citation | The Winter Annual Meeting of the American Society of Mechanical Engineers 1991, Atlanta, GA, 1-6 December 1991. In Micromechanical sensors, actuators and systems: presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, George, December 1-6, 1991, 1991, p. 197-202 | - |
| dc.identifier.isbn | 9780791808634 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/302583 | - |
| dc.description.abstract | In this paper, we propose mechanism of an electrostatic micromanipulator with six-degree-of-freedom (6 D.O.F) and describe static characteristics of the prototype micromanipulator. Its main features are summarized as follows: (1) it is structurally very compact, since the actuator system is fabricated and assembled through the photoetching process; (2) the manipulator can move along three axes, and can also rotate around each axis(6 D.O.F). No backlash exists and it has subnanometer resolution. The sensing method of the tip motion is described and the static characteristics of the tip motion is measured. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V. | - |
| dc.language | eng | - |
| dc.publisher | American Society of Mechanical Engineers. | - |
| dc.relation.ispartof | Micromechanical sensors, actuators and systems: presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, George, December 1-6, 1991 | - |
| dc.relation.ispartofseries | DSC (Series) ; 32 | - |
| dc.title | Electrostatic micro/nano manipulator with 6 D.O.F | - |
| dc.type | Conference_Paper | - |
| dc.identifier.scopus | eid_2-s2.0-0026375143 | - |
| dc.identifier.spage | 197 | - |
| dc.identifier.epage | 202 | - |