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Article: A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS

TitleA Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS
Authors
Keywordsgallium nitride
photonic integration
pressure sensing
nanospheres
PDMS
Issue Date2021
PublisherAmerican Chemical Society. The Journal's web site is located at https://pubs.acs.org/journal/aaembp
Citation
ACS Applied Electronic Materials , 2021, v. 3 n. 5, p. 1982-1987 How to Cite?
AbstractPressure sensing based on high-sensitivity and fast-response photonic devices is essential for various transient and dynamic processes in diverse fields. Therefore, a miniaturized device being capable of precise and reliable detection is highly desired for the development of optical pressure sensors. Here, we develop a compact pressure sensor, showing a sensitivity of 1 μA/kPa and a fast response time of <10 ms, based on a III-nitride photonic chip combined with a PDMS membrane on submillimeter-scale footprints. The emitter and detector are monolithically integrated on a GaN-on-sapphire chip consisting of InGaN/GaN multiquantum wells, enabling quantitative readout for pressure sensing. Self-assembled polystyrene nanospheres are embedded in the PDMS layer and function as an opal-based photonic crystal, transforming the received mechanical signals into optical signals which can be precisely determined through recorded photocurrent. This underlying mechanism of angle-dependent reflective characteristics via the photonic bandgap effect is well fitted by our theoretical simulation. Sensors with opal films embedded at different vertical positions are fabricated, and their corresponding performance is systematically studied and compared through a series of pressure loading/unloading tests. The demonstrated high repeatability, stability, and durability of the developed chip-scale optical pressure sensor, paving the way for its widespread usage.
Persistent Identifierhttp://hdl.handle.net/10722/305354
ISSN
2023 Impact Factor: 4.3
2023 SCImago Journal Rankings: 1.058
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorJing, J-
dc.contributor.authorAn, X-
dc.contributor.authorLuo, Y-
dc.contributor.authorChen, L-
dc.contributor.authorChu, Z-
dc.contributor.authorLi, KH-
dc.date.accessioned2021-10-20T10:08:14Z-
dc.date.available2021-10-20T10:08:14Z-
dc.date.issued2021-
dc.identifier.citationACS Applied Electronic Materials , 2021, v. 3 n. 5, p. 1982-1987-
dc.identifier.issn2637-6113-
dc.identifier.urihttp://hdl.handle.net/10722/305354-
dc.description.abstractPressure sensing based on high-sensitivity and fast-response photonic devices is essential for various transient and dynamic processes in diverse fields. Therefore, a miniaturized device being capable of precise and reliable detection is highly desired for the development of optical pressure sensors. Here, we develop a compact pressure sensor, showing a sensitivity of 1 μA/kPa and a fast response time of <10 ms, based on a III-nitride photonic chip combined with a PDMS membrane on submillimeter-scale footprints. The emitter and detector are monolithically integrated on a GaN-on-sapphire chip consisting of InGaN/GaN multiquantum wells, enabling quantitative readout for pressure sensing. Self-assembled polystyrene nanospheres are embedded in the PDMS layer and function as an opal-based photonic crystal, transforming the received mechanical signals into optical signals which can be precisely determined through recorded photocurrent. This underlying mechanism of angle-dependent reflective characteristics via the photonic bandgap effect is well fitted by our theoretical simulation. Sensors with opal films embedded at different vertical positions are fabricated, and their corresponding performance is systematically studied and compared through a series of pressure loading/unloading tests. The demonstrated high repeatability, stability, and durability of the developed chip-scale optical pressure sensor, paving the way for its widespread usage.-
dc.languageeng-
dc.publisherAmerican Chemical Society. The Journal's web site is located at https://pubs.acs.org/journal/aaembp-
dc.relation.ispartofACS Applied Electronic Materials-
dc.rightsThis document is the Accepted Manuscript version of a Published Work that appeared in final form in [JournalTitle], copyright © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see [insert ACS Articles on Request author-directed link to Published Work, see http://pubs.acs.org/page/policy/articlesonrequest/index.html].-
dc.subjectgallium nitride-
dc.subjectphotonic integration-
dc.subjectpressure sensing-
dc.subjectnanospheres-
dc.subjectPDMS-
dc.titleA Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS-
dc.typeArticle-
dc.identifier.emailChu, Z: zqchu@eee.hku.hk-
dc.identifier.authorityChu, Z=rp02472-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1021/acsaelm.1c00130-
dc.identifier.scopuseid_2-s2.0-85106408100-
dc.identifier.hkuros328154-
dc.identifier.volume3-
dc.identifier.issue5-
dc.identifier.spage1982-
dc.identifier.epage1987-
dc.identifier.isiWOS:000656986700003-
dc.publisher.placeUnited States-

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