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Article: Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model

TitleImproving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model
Authors
KeywordsAtomic force microscope
Direct inverse asymmetric PI model
Feedforward control
Hysteresis
Piezoelectric actuator
Issue Date2015
Citation
Sensors (Switzerland), 2015, v. 15, n. 2, p. 3409-3425 How to Cite?
AbstractA modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describe the asymmetric motion of the actuator. In order to improve the accuracy of AFM scans, two series of slope parameters were introduced in the PI model to describe both the voltage-increase-loop (trace) and voltage-decrease-loop (retrace). A feedforward controller based on the DIAPI model was implemented to compensate hysteresis. Performance of the DIAPI model and the feedforward controller were validated by scanning micro-lenses and standard silicon grating using a custom-built AFM.
Persistent Identifierhttp://hdl.handle.net/10722/325286
ISSN
2023 Impact Factor: 3.4
2023 SCImago Journal Rankings: 0.786
PubMed Central ID
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorWang, Dong-
dc.contributor.authorYu, Peng-
dc.contributor.authorWang, Feifei-
dc.contributor.authorChan, Ho Yin-
dc.contributor.authorZhou, Lei-
dc.contributor.authorDong, Zaili-
dc.contributor.authorLiu, Lianqing-
dc.contributor.authorLi, Wen Jung-
dc.date.accessioned2023-02-27T07:31:14Z-
dc.date.available2023-02-27T07:31:14Z-
dc.date.issued2015-
dc.identifier.citationSensors (Switzerland), 2015, v. 15, n. 2, p. 3409-3425-
dc.identifier.issn1424-8220-
dc.identifier.urihttp://hdl.handle.net/10722/325286-
dc.description.abstractA modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describe the asymmetric motion of the actuator. In order to improve the accuracy of AFM scans, two series of slope parameters were introduced in the PI model to describe both the voltage-increase-loop (trace) and voltage-decrease-loop (retrace). A feedforward controller based on the DIAPI model was implemented to compensate hysteresis. Performance of the DIAPI model and the feedforward controller were validated by scanning micro-lenses and standard silicon grating using a custom-built AFM.-
dc.languageeng-
dc.relation.ispartofSensors (Switzerland)-
dc.rightsThis work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.-
dc.subjectAtomic force microscope-
dc.subjectDirect inverse asymmetric PI model-
dc.subjectFeedforward control-
dc.subjectHysteresis-
dc.subjectPiezoelectric actuator-
dc.titleImproving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model-
dc.typeArticle-
dc.description.naturepublished_or_final_version-
dc.identifier.doi10.3390/s150203409-
dc.identifier.pmid25654719-
dc.identifier.pmcidPMC4367365-
dc.identifier.scopuseid_2-s2.0-84922327122-
dc.identifier.volume15-
dc.identifier.issue2-
dc.identifier.spage3409-
dc.identifier.epage3425-
dc.identifier.isiWOS:000351992700006-

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