Research on flow field character of micro electroforming of metallic microstructure

Abstract

To improve the micro electroforming quality of the microstructure with large high aspect ratio, the characteristics of the micro electroforming process and the property of the flow field were analyzed and discussed systematically. The asymmetry phenomena of the deposit and the effect of the stirring mode, flow field on the microstructure were studied in detail. Experiment showed that the effect of the pure stirring concentrated on the entrance of the micro groove only. Diffusion was the control factors of micro electroforming process. The effect influencing on the mass transferring reduced with the increasing high aspect ratio of the deposit, which resulting in the discrepancy of ion transferring capacity in the reaction area. The results also showed that the stirring velocity could not improve transferring condition, while complex stirring with auxiliary ultrasonic could help to increase the deposit velocity and get the perfect microstructure. Based on the research on the flow field, high resolute electroforming microstructure with vertical wall was fabricated.