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Conference Paper: Laser micro-machining of three-dimensional microstructures in optical materials

TitleLaser micro-machining of three-dimensional microstructures in optical materials
Authors
Wang, XHLai, PTChoi, HW
KeywordsConvergent beams
Hard material
Horizontal machining
Laser micro-machining
Machining methods
Issue Date2009
PublisherMaterials Research Society. The Journal's web site is located at http://www.mrs.org/publications/epubs/proceedings/spring2004/index.html
Citation
The 2009 Spring Meeting of the Materials Research Society (MRS), San Francisco, CA., 13-17 April 2009. In Materials Research Society Symposium Proceedings, 2009, v. 1179, p. 99-103 How to Cite?
AbstractWe demostrate an advanced precision cutting tool using a 349 nm nanosecond pulsed UV laser micromachining setup. After expansion and collimation, the laser beam is directed vertically and focused with a high performance triplet lens. With an Al mirror inserted in the path of the convergent beam, the beam can be focused on a horizontal machining plane at any desired tilting angles. Microstructures of a wide range of geometries on hard materials can be formed using this custom machining method. Conventional linear and rotary machining on sapphire materials have been demonstrated.
Persistent Identifierhttp://hdl.handle.net/10722/62135
ISSN
0272-9172
2019 SCImago Journal Rankings: 0.114
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorWang, XHen_HK
dc.contributor.authorLai, PTen_HK
dc.contributor.authorChoi, HWen_HK
dc.date.accessioned2010-07-13T03:54:36Z-
dc.date.available2010-07-13T03:54:36Z-
dc.date.issued2009en_HK
dc.identifier.citationThe 2009 Spring Meeting of the Materials Research Society (MRS), San Francisco, CA., 13-17 April 2009. In Materials Research Society Symposium Proceedings, 2009, v. 1179, p. 99-103en_HK
dc.identifier.issn0272-9172en_HK
dc.identifier.urihttp://hdl.handle.net/10722/62135-
dc.description.abstractWe demostrate an advanced precision cutting tool using a 349 nm nanosecond pulsed UV laser micromachining setup. After expansion and collimation, the laser beam is directed vertically and focused with a high performance triplet lens. With an Al mirror inserted in the path of the convergent beam, the beam can be focused on a horizontal machining plane at any desired tilting angles. Microstructures of a wide range of geometries on hard materials can be formed using this custom machining method. Conventional linear and rotary machining on sapphire materials have been demonstrated.en_HK
dc.languageengen_HK
dc.publisherMaterials Research Society. The Journal's web site is located at http://www.mrs.org/publications/epubs/proceedings/spring2004/index.htmlen_HK
dc.relation.ispartofMaterials Research Society Symposium Proceedingsen_HK
dc.rightsMaterials Research Society Symposium Proceedings. Copyright © Materials Research Society.-
dc.subjectConvergent beams-
dc.subjectHard material-
dc.subjectHorizontal machining-
dc.subjectLaser micro-machining-
dc.subjectMachining methods-
dc.titleLaser micro-machining of three-dimensional microstructures in optical materialsen_HK
dc.typeConference_Paperen_HK
dc.identifier.openurlhttp://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0272-9172&volume=1179&spage=99&epage=103&date=2009&atitle=Laser+micro-machining+of+three-dimensional+microstructures+in+optical+materials-
dc.identifier.emailLai, PT:laip@eee.hku.hken_HK
dc.identifier.emailChoi, HW:hwchoi@eee.hku.hken_HK
dc.identifier.authorityLai, PT=rp00130en_HK
dc.identifier.authorityChoi, HW=rp00108en_HK
dc.description.naturepublished_or_final_version-
dc.identifier.scopuseid_2-s2.0-70450128085en_HK
dc.identifier.hkuros163476en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-70450128085&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume1179en_HK
dc.identifier.spage99en_HK
dc.identifier.epage103en_HK
dc.publisher.placeUnited Statesen_HK
dc.description.otherThe 2009 Spring Meeting of the Materials Research Society (MRS), San Francisco, CA., 13-17 April 2009. In Materials Research Society Symposium Proceedings, 2009, v. 1179, p. 99-103-
dc.identifier.scopusauthoridWang, XH=36715744900en_HK
dc.identifier.scopusauthoridLai, PT=7202946460en_HK
dc.identifier.scopusauthoridChoi, HW=7404334877en_HK
dc.identifier.issnl0272-9172-

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