Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2018 | |||
Design and fabrication of micro hot-wire flow sensor using 0.35μm CMOS MEMS technology Proceeding/Conference:9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 | 2014 | 132 |