Browsing by Author Lv, W

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Showing results 1 to 8 of 8
TitleAuthor(s)Issue DateViews
 
Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography
Journal:Journal of Micro/Nanolithography, MEMS, and MOEMS
2014
76
 
2016
88
 
2021
5
 
Level-set-based inverse lithography for mask synthesis using the conjugate gradient and an optimal time step
Journal:Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics
2013
77
 
2017
85
 
2015
54
 
2019
36
 
2016
87